By Michel Houssa
ISBN-10: 0750309067
ISBN-13: 9780750309066
High okay Gate Dielectrics studies the cutting-edge in excessive permittivity gate dielectric examine. including contributions from major researchers from Europe and america, the e-book first describes many of the deposition strategies used for development of layers at those dimensions. It then considers characterization innovations of the actual, chemical, structural, and digital homes of those fabrics. The e-book additionally stories the theoretical paintings performed within the box and concludes with technological applications.
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High k Gate Dielectrics (Series in Materials Science and Engineering) by Michel Houssa
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