By Michel Houssa

ISBN-10: 0750309067

ISBN-13: 9780750309066

The force towards smaller and smaller digital componentry has large implications for the fabrics at the moment getting used. As quantum mechanical results start to dominate, traditional fabrics won't be able to operate at scales a lot smaller than these in present use. consequently, new fabrics with better electric permittivity can be required, making it is a topic of extensive study task in the microelectronics neighborhood.

High okay Gate Dielectrics studies the cutting-edge in excessive permittivity gate dielectric examine. including contributions from major researchers from Europe and america, the e-book first describes many of the deposition strategies used for development of layers at those dimensions. It then considers characterization innovations of the actual, chemical, structural, and digital homes of those fabrics. The e-book additionally stories the theoretical paintings performed within the box and concludes with technological applications.

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High k Gate Dielectrics (Series in Materials Science and Engineering) by Michel Houssa


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